Issue
Int. J. Simul. Multidisci. Des. Optim.
Volume 12, 2021
Simulation and Optimization for Industry 4.0
Article Number 14
Number of page(s) 6
DOI https://doi.org/10.1051/smdo/2021013
Published online 24 August 2021
  1. M. Nag, J. Singh, A. Kumar, K. Singh, A high sensitive graphene piezoresistive MEMS pressure sensor by integration of rod beams in silicon diaphragm for low pressure measurement application, Microsyst. Technolog. 26, 2971–2976 (2020) [CrossRef] [Google Scholar]
  2. M. Nag, M. Lamba, K. Singh, A. Kumar, Modelling and simulation of MEMS graphene pressure sensor for healthcare devices, in Proceedings of International Conference in Mechanical and Energy Technology (Springer, Singapore, 2020), pp. 607–612 [CrossRef] [Google Scholar]
  3. Y. Pang, Z. Yang, Y. Yang, X. Wu, Y. Yang, T.L. Ren, Graphene based wearable sensors for healthcare, in 2019 International Conference on IC Design and Technology (ICICDT) (IEEE, 2019), pp. 1–4 [Google Scholar]
  4. Y. Shi, L. Ye, A.H. Zehri, N. Logothetis, P. Su, N. Wang, J. Liu, Fabrication and characterization of graphene based film, in 2017 IMAPS Nordic Conference on Microelectronics Packaging (NordPac) (IEEE, 2017), pp. 162–166 [CrossRef] [Google Scholar]
  5. H. Tian, Y. Shu, X.F. Wang, M.A. Mohammad, Z. Bie, Q.Y. Xie et al., A graphene-based resistive pressure sensor with record-high sensitivity in a wide pressure range, Sci. Rep. 5, 1–6 (2015) [Google Scholar]
  6. M.A. Shazni, M.W. Lee, H.W. Lee, Highly-sensitive graphene-based flexible pressure sensor platform, Sains Malaysiana 46, 1155–1161 (2017) [CrossRef] [Google Scholar]
  7. M. Nie, Y.H. Xia, H.S. Yang, A flexible and highly sensitive graphene-based strain sensor for structural health monitoring, Cluster Comput. 22, 8217–8224 (2019) [CrossRef] [Google Scholar]
  8. B. Saha, S. Baek, J. Lee, Highly sensitive bendable and foldable paper sensors based on reduced graphene oxide, ACS Appl. Mater. Interfaces 9, 4658–4666 (2017) [CrossRef] [Google Scholar]
  9. T. Yang, X. Jiang, Y. Zhong, X. Zhao, S. Lin, A wearable and highly sensitive graphene strain sensor for precise home-based pulse wave monitoring, ACS Sensors 2, 967–974 (2017) [CrossRef] [Google Scholar]
  10. S. Chun, Y. Kim, H.S. Oh, G. Bae, W. Park, A highly sensitive pressure sensor using a double-layered graphene structure for tactile sensing, Nanoscale 7, 11652–11659 (2015) [CrossRef] [PubMed] [Google Scholar]
  11. A. Rinaldi, A. Tamburrano, M. Fortunato, M.S. Sarto, A flexible and highly sensitive pressure sensor based on a PDMS foam coated with graphene nanoplatelets, Sensors 16, 2148 (2016) [CrossRef] [Google Scholar]
  12. N. Inoue, H. Onoe, Graphene-based inline pressure sensor integrated with microfluidic elastic tube, J. Micromech. Microeng. 28, 014001 (2017) [CrossRef] [Google Scholar]
  13. S. Chun, H. Jung, Y. Choi, G. Bae, J.P. Kil, W. Park, A tactile sensor using a graphene film formed by the reduced graphene oxide flakes and its detection of surface morphology, Carbon 94, 982–987 (2015) [CrossRef] [Google Scholar]
  14. C.B. Huang, S. Witomska, A. Aliprandi, M.A. Stoeckel, M. Bonini, A. Ciesielski, P. Samorì, Molecule–graphene hybrid materials with tunable mechanoresponse: highly sensitive pressure sensors for health monitoring, Adv. Mater. 31, 1804600 (2019) [CrossRef] [Google Scholar]
  15. U.S. Kumar, N.J. Babu, Design and simulation of MEMS Piezoresistive Pressure Sensor to Improve the sensitivity, Int. J. Innov. Res. Electr. Electr. Instrum. Control Eng. 3 (2015) [Google Scholar]
  16. S. Meti, K.B. Balavalad, A.C. Katageri, B.G. Sheeparamatti, Sensitivity enhancement of piezoresistive pressure sensor with meander shape piezoresistor, in 2016 International Conference on Energy Efficient Technologies for Sustainability (ICEETS) (IEEE, 2016), pp. 890–895 [CrossRef] [Google Scholar]
  17. M. Hayati, M. Fathipour, H.S. Vaziri, Design and analysis of hairpin piezoresistive pressure sensor with improved linearity using square and circular diaphragms, Micro Nano Lett. 13, 1046–1051 (2018) [CrossRef] [Google Scholar]
  18. J. Ou, J. Wang, S. Liu, B. Mu, J. Ren, H. Wang, S. Yang, Tribology study of reduced graphene oxide sheets on silicon substrate synthesized via covalent assembly, Langmuir 26, 15830–15836 (2010) [CrossRef] [Google Scholar]
  19. Q. Hongwei, Y. Suying, Z. Rong, M. Ganru, Z. Weixin, M. Xiaoqiang, L. Lei, Polysilicon piezoresistive pressure sensor and its temperature compensation, in 1998 5th International Conference on Solid-State and Integrated Circuit Technology. Proceedings (Cat. No. 98EX105) (IEEE, 1998), pp. 914–916 [CrossRef] [Google Scholar]
  20. M.H.M. Khir, P. Qu, H. Qu, A low-cost CMOS-MEMS piezoresistive accelerometer with large proof mass, Sensors 11, 7892–7907 (2011) [CrossRef] [Google Scholar]
  21. M. Nag, J. Singh, A. Kumar, P.A. Alvi, K. Singh, Sensitivity enhancement and temperature compatibility of graphene piezoresistive MEMS pressure sensor, Microsyst. Technolog. 25, 3977–3982 (2019) [CrossRef] [Google Scholar]
  22. W.B. Zimmerman, Introduction to COMSOL multiphysics, in Multiphysics Modeling with Finite Element Methods Citation Key: Zimmerman 2006 (World Scientific Publishing Company, 2006), pp. 1–26 [Google Scholar]
  23. A.A. Barlian, W.T. Park, J.R. Mallon, A.J. Rastegar, B.L. Pruitt, Semiconductor piezoresistance for Microsystems, Proc. IEEE 97, 513–552 (2009) [CrossRef] [Google Scholar]
  24. S.T.A. Hamdani, A. Fernando, The application of a piezo-resistive cardiorespiratory sensor system in an automobile safety belt, Sensors 15, 7742–7753 (2015) [CrossRef] [Google Scholar]
  25. K.Y. Madhavi, M. Krishna, C.C. Murthy, Effect of diaphragm geometry and piezoresistor dimensions on the sensitivity of a piezoresistive micropressure sensor using finite element analysis, IJESE 1 (2013) [Google Scholar]
  26. J. Akhtar, B.B. Dixit, B.D. Pant, V.P. Deshwal, Polysilicon piezoresistive pressure sensors based on MEMS technology, IETE J. Res. 49, 365–377 (2003) [CrossRef] [Google Scholar]
  27. N. Barakat, A. Plotkowski, H. Jiao, Design and Computational analysis of Diaphragm Based Piezoresistive Pressure Sensors for Integration into Undergraduate Curriculum (2011) [Google Scholar]
  28. T. Guan, F. Yang, W. Wang, X. Huang, B. Jiang, D. Zhang, The design and analysis of piezoresistive shuriken-structured diaphragm micro-pressure sensors, J. Microelectromech. Syst. 26, 206–214 (2016) [CrossRef] [Google Scholar]
  29. J.C. Doll, S.J. Park, B.L. Pruitt, Design optimization of piezoresistive cantilevers for force sensing in air and water, J. Appl. Phys. 106, 064310 (2009) [CrossRef] [Google Scholar]
  30. J. Sosa, J.A. Montiel-Nelson, R. Pulido, J.C. Garcia-Montesdeoca, Design and optimization of a low power pressure sensor for wireless biomedical applications, J. Sens. 2015 (2015) [Google Scholar]
  31. S.K. Jindal, S.P. Magam, M. Shaklya, Analytical modeling and simulation of MEMS piezoresistive pressure sensors with a square silicon carbide diaphragm as the primary sensing element under different loading conditions, J. Comput. Electr. 17, 1780–1789 (2018) [CrossRef] [Google Scholar]
  32. A.E. Kubba, A. Hasson, A.I. Kubba, G. Hall, A micro-capacitive pressure sensor design and modelling, J. Sens. Sens. Syst. 5, 95–112 (2016) [CrossRef] [Google Scholar]
  33. M. Nag, M. Lamba, K. Singh, A. Kumar, Modelling and simulation of MEMS graphene pressure sensor for healthcare devices, in Proceedings of International Conference in Mechanical and Energy Technology (Springer, Singapore, 2020), pp. 607–612 [CrossRef] [Google Scholar]
  34. M. Nag, A. Kumar, K. Singh, B. Pratap, Graphene based flexible piezoresistive pressure sensor for electric vehicles applications, in AIP Conference Proceedings (AIP Publishing LLC, 2020), Vol. 2294, p. 020009 [CrossRef] [Google Scholar]

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