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Home All issues Volume 13 (2022) Int. J. Simul. Multidisci. Des. Optim., 13 (2022) 27 References
Issue
Int. J. Simul. Multidisci. Des. Optim.
Volume 13, 2022
Simulation and Optimization for Industry 4.0
Article Number 27
Number of page(s) 15
DOI https://doi.org/10.1051/smdo/2022018
Published online 23 December 2022
  1. B.W. Soon, P. Neuzil, C.C. Wong, J. Reboud, H.H. Feng, C. Lee, Ultrasensitive nanowire pressure sensor makes its debut, Procedia Eng. 5, 1127–1130 (2010) [CrossRef] [Google Scholar]
  2. S.S.K.B.D. Pant, Design principles and considerations for the ‘ideal’ silicon piezoresistive pressure sensor: a focused review, no. Tandeske 1991 (2014) [Google Scholar]
  3. S.S. Kumar, B.D. Pant, A MATLAB program for quick estimation of characteristics of piezoresistive pressure sensors, AIP Conf. Proc. 1989, 020021 (2018) [CrossRef] [Google Scholar]
  4. C. Zhou, Y. Zhang, B. Zheng, W. Xue, Q. Wang, Effect of internal stress on nonlinearity and sensitivity of a pressure sensor with SiN composite diaphragm, Phys. Lett. A 1, 1–8 (2016) [Google Scholar]
  5. J. Singh, K. Rajanna, A.M. Reddy, K. Singh, Effect of process deviations on performance of piezoresistive pressure sensors, IEEE Trans. Semiconduct. Manufactur. 27, 410–416 (2014) [CrossRef] [Google Scholar]
  6. S. Sensitivity, Mechanical structural design of a piezoresistive pressure sensor for low-pressure measurement: a computational analysis by increases in the sensor sensitivity, Sensors 18, 2023 (2018) [Google Scholar]
  7. S. Meti, Sensitivity enhancement of piezoresistive pressure sensor with meander shape piezoresistor, in 2016 International Conference on Energy Efficient Technologies for Sustainability (ICEETS), 890–895 (2016) [CrossRef] [Google Scholar]
  8. L. Lin, H. Chu, Y. Lu, A simulation program for the sensitivity and linearity of piezoresistive pressure sensors, J. Microelectromech. Syst. 8, 514–522 (1999) [CrossRef] [Google Scholar]
  9. X. Zhao, Y. Yu, D. Li, D. Wen, Design, fabrication and characterization of a high-sensitivity pressure sensor based on nano-polysilicon thin film transistors, AIP Adv. 5, 12 (2015) [Google Scholar]
  10. S. Chun, Y. Choi, W. Park, All-graphene strain sensor on soft substrate, Carbon N.Y. (2017) [Google Scholar]
  11. V. Kutiš, J. Dzuba, J. Paulech, J. Murín, T. Lalinský, MEMS piezoelectric pressure sensor-modelling and simulation, Proc. Eng. 48, 338–345 (2012) [CrossRef] [Google Scholar]
  12. P. Eswaran, S. Malarvizhi, MEMS capacitive pressure sensors: a review on recent development and prospective, Int. J. Eng. Technol. 5, 2734–2746 (2013) [Google Scholar]
  13. M. Nag, A. Kumar, K. Singh, B. Pratap, Graphene based flexible piezoresistive pressure sensor for electric vehicles applications, AIP Conf. Proc. 2294, 020009 (2020) [CrossRef] [Google Scholar]
  14. M. Kang, C. Ri, J. Choe, Capacitance response of concave well substrate touch-mode capacitive pressure sensor: mathematical analysis and simulation, Microelectr. J. 114, 105118 (2021) [CrossRef] [Google Scholar]
  15. Z.H. Khan, A.R. Kermany, A. Öchsner, F. Iacopi, Mechanical and electromechanical properties of graphene and their potential application in MEMS, J. Phys. D 50, 053003 (2017) [CrossRef] [Google Scholar]
  16. C. Li, J. Xie, F. Cordovilla, J. Zhou, R. Jagdheesh, J.L. Ocaña, Design, fabrication and characterization of an annularly grooved membrane combined with rood beam piezoresistive pressure sensor for low pressure measurements, Sens. Actuat. A (2018) [Google Scholar]
  17. K. Singh, R. Joyce, S. Varghese, J. Akhtar, Fabrication of electron beam physical vapor deposited polysilicon piezoresistive MEMS pressure sensor, Sens. Actuat. A (2015) [Google Scholar]
  18. M. Nag, J. Singh, A. Kumar, P.A.A. Kulwant, Sensitivity enhancement and temperature compatibility of graphene piezoresistive MEMS pressure sensor, Microsyst. Technol. 5, 2011 (2019) [Google Scholar]
  19. S. Melennavar, A.C. Kategeri, Theoretical analysis of the design of different shape diaphragm for piezoresistive pressure sensor; theoretical analysis of the design of different shape diaphragm for piezoresistive pressure sensor, Int. J. Eng. Res. Technol. 6 (2017) [Google Scholar]
  20. T. Sarkar, M. Kumar Kundu, M.A.A. Azmain, M.A.G. Khan, Thermal conduction in graphene thin films considering different materials of various shapes, in 2017 International Conference on Electrical, Computer and Communication Engineering (ECCE) (2017) [Google Scholar]
  21. M. Hayati, M. Fathipour, H.S. Vaziri, Design and analysis of hairpin piezoresistive pressure sensor with improved linearity using square and circular diaphragms, Micro Nano Lett. 13, 1046–1051 (2018) [CrossRef] [Google Scholar]
  22. X. Huang, D. Zhang, A high sensitivity and high linearity pressure sensor based on a peninsula-structured diaphragm for low-pressure ranges, Sens. Actuat. A 216, 176–189 (2014) [CrossRef] [Google Scholar]
  23. M. Nag, J. Singh, A. Kumar, K. Singh, A high sensitive graphene piezoresistive MEMS pressure sensor by integration of rod beams in silicon diaphragm for low pressure measurement application, Microsyst. Technolog. 26, 2971–2976 (2020) [CrossRef] [Google Scholar]
  24. M. Nag, A. Kumar, B. Pratap, A novel graphene pressure sensor with zig-zag shaped piezoresistors for maximum strain coverage for enhancing the sensitivity of the pressure sensor, Int. J. Simul. Multidiscip. Des. Optim. 12, 14 (2021) [CrossRef] [EDP Sciences] [Google Scholar]
  25. M. Nag, M. Lamba, K. Singh, A. Kumar, Modelling and simulation of MEMS graphene pressure sensor for healthcare devices, in Proceedings of International Conference in Mechanical and Energy Technology (pp. 607–612). Springer, Singapore (2020) [CrossRef] [Google Scholar]
  26. B. Davaji et al., A patterned single layer graphene resistance temperature sensor, Sci. Rep. 7, 1–10 (2017) [CrossRef] [Google Scholar]
  27. Z. Wang et al., 3D-printed graphene/polydimethylsiloxane composites for stretchable and strain-insensitive temperature sensors, ACS Appl. Mater. Interfaces 11, 1344–1352 (2019) [CrossRef] [Google Scholar]
  28. B. Guo, L. Fang, B. Zhang, J.R. Gong, Graphene doping: a review, Insciences J. 1, 80–89 (2011) [CrossRef] [Google Scholar]
  29. M. Abouelmajd, A. Bahlaoui, I. Arroub, M. Zemzami, N. Hmina, M. Lagache, S. Belhouideg, Experimental analysis and optimization of mechanical properties of FDM-processed polylactic acid using Taguchi design of experiment, Int. J. Simul. Multidiscipl. Des. Optim. 12, 30 (2021) [CrossRef] [EDP Sciences] [Google Scholar]
  30. C. Li, F. Cordovilla, J.L. Ocaña, Annularly grooved membrane combined with rood beam piezoresistive pressure sensor for low pressure applications, Rev. Sci. Instru. 88, 035002 (2017) [CrossRef] [Google Scholar]
  31. M.S. Manjunath, N. Nagarjuna, G. Uma, M. Umapathy, M.M. Nayak, K. Rajanna, Design, fabrication and testing of reduced graphene oxide strain gauge based pressure sensor with increased sensitivity, Microsyst. Technolog. 24, 2969–2981 (2018) [CrossRef] [Google Scholar]

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