Open Access
Table 3
defines the different value of factors creating three levels such as Level 1, Level 2 and Level 3.
| Design factors | Level | ||
|---|---|---|---|
| 1 | 2 | 3 | |
| (A) Diaphragm Thickness | 20 μm | 40 μm | 60 μm |
| (B) Length | 390 μm | 400 μm | 410 μm |
| (C) Thickness | 0.09 μm | 0.1 μm | 0.2 μm |
| (D) Doping Concentration | 1012 cm–3 | 1014 cm–3 | 1016 cm–3 |
| (E) Temperature | 20 °C | 40 °C | 60 °C |
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