Table 3

defines the different value of factors creating three levels such as Level 1, Level 2 and Level 3.

Design factors   Level  
  1 2 3
(A) Diaphragm Thickness 20 μm 40 μm 60 μm
(B) Length 390 μm 400 μm 410 μm
(C) Thickness 0.09 μm 0.1 μm 0.2 μm
(D) Doping Concentration 1012 cm–3 1014 cm–3 1016 cm–3
(E) Temperature 20 °C 40 °C 60 °C

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