defines the different value of factors creating three levels such as Level 1, Level 2 and Level 3.
|(A) Diaphragm Thickness||20 μm||40 μm||60 μm|
|(B) Length||390 μm||400 μm||410 μm|
|(C) Thickness||0.09 μm||0.1 μm||0.2 μm|
|(D) Doping Concentration||1012 cm–3||1014 cm–3||1016 cm–3|
|(E) Temperature||20 °C||40 °C||60 °C|
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