Table 1

Specifications of the pressure sensor

Sensor specifications Value
Size of the device 4 mm × 4 mm
Diaphragm Thickness H μm
Diaphragm Length 2 mm × 2 mm
Shape of Diaphragm Square diaphragm
Dimensions of the piezo-resistors L × 10 × T (Length × Width × Thickness) μm
Input Voltage 3.3V
Applied Pressure Range 0-100 psi
Substrate Material Silicon Wafer
Sensing Material Graphene
Material for Contact Pads Gold and Tin

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