Open Access
Table 1
Specifications of the pressure sensor
| Sensor specifications | Value |
|---|---|
| Size of the device | 4 mm × 4 mm |
| Diaphragm Thickness | H μm |
| Diaphragm Length | 2 mm × 2 mm |
| Shape of Diaphragm | Square diaphragm |
| Dimensions of the piezo-resistors | L × 10 × T (Length × Width × Thickness) μm |
| Input Voltage | 3.3V |
| Applied Pressure Range | 0-100 psi |
| Substrate Material | Silicon Wafer |
| Sensing Material | Graphene |
| Material for Contact Pads | Gold and Tin |
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