Multi objective design optimization of graphene piezoresistive MEMS pressure sensor using design of experiment | International Journal for Simulation and Multidisciplinary Design Optimization (IJSMDO)

Simulation and Optimization for Industry 4.0

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Table 10

Comparative study of optimized Graphene pressure sensor with the existing graphene pressure sensor.

Parameters	Optimized model	Chuang Lia [30]	Manjunath [31]	Shou-En zhu [28]
Sensitivity	4.10mV/psi	30.9mV/V/psi	2.29Ω/Bar	0.586 mV/psi
Non linearity	0.1%	0.25%	0.65%	Very low

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