Open Access
Table 1
Material properties of the capacitive pressure sensor.
| Material type | Density kg/m3 | Young's modulus × 109 Pa |
Poisson's ratio | Coefficient of thermal expansion α
× 10−6 1/K |
|---|---|---|---|---|
| AlN | 3300 | 326 | 0.25 | 5.0 |
| ZnO | 5676 | 210 | 0.33 | 2.9 |
| ZnS | 3980 | 74.5 | 0.28 | 6.5 |
| Steel AISI 4340 | 7850 | 205 | 0.28 | 12.3 |
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