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Modeling of a square-shape ZnO, ZnS and AlN membrane for mems capacitive pressure-sensor applications

Ahmad Dagamseh, Qais Al-Bataineh, Zaid Al-Bataineh, Nermeen S. Daoud, Ahmad Alsaad and Ahmad Omari

Int. J. Simul. Multidisci. Des. Optim., 11 (2020) 14

DOI: https://doi.org/10.1051/smdo/2020010

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