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Cited article:

Modeling of a square-shape ZnO, ZnS and AlN membrane for mems capacitive pressure-sensor applications

Ahmad Dagamseh, Qais Al-Bataineh, Zaid Al-Bataineh, Nermeen S. Daoud, Ahmad Alsaad, Ahmad Omari

Int. J. Simul. Multidisci. Des. Optim., 11 (2020) 14

Published online: 2020-08-04

DOI: https://doi.org/10.1051/smdo/2020010

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