Modeling of a square-shape ZnO, ZnS and AlN membrane for mems capacitive pressure-sensor applications
Int. J. Simul. Multidisci. Des. Optim., 11 (2020) 14
Published online: 2020-08-04
Articles citing this article
The Citing articles tool gives a list of articles citing the current article.
The citing articles come from EDP Sciences database, as well as other publishers participating in CrossRef Cited-by Linking Program. You can set up your personal account to receive an email alert each time this article is cited by a new article (see the menu on the right-hand side of the abstract page).
Cited article:
This article has been cited by the following article(s):
Analysis on sensitivity enhancement of MEMS based capacitive pressure sensor for low pressure healthcare monitoring
Kavitha Jagabathuni and Swapna PeravaliAnalog Integrated Circuits and Signal Processing 124 (1) (2025)
https://doi.org/10.1007/s10470-025-02411-2
Performance Analysis of Novel Square-Shaped MEMS-Based Capacitive Pressure Sensor for Low-Pressure Applications
Kavitha Jagabathuni, Movva Pramod and Swapna PeravaliIETE Journal of Research 1 (2025)
https://doi.org/10.1080/03772063.2025.2546160
Optimal design parameter estimation and analytical investigation of MEMS quadruple touch mode capacitive pressure sensor
Rukshana Bi Gajula and Sumit Kumar JindalSensor Review 45 (1) 87 (2025)
https://doi.org/10.1108/SR-06-2024-0534
124 (2024)
https://doi.org/10.1109/MEMSTECH63437.2024.10620059
Optimizing Capacitive Pressure Sensor Geometry: A Design of Experiments Approach with a Computer-Generated Model
Kiran Keshyagol, Shivashankarayya Hiremath, Vishwanatha H. M., Achutha Kini U., Nithesh Naik and Pavan HiremathSensors 24 (11) 3504 (2024)
https://doi.org/10.3390/s24113504
1 (2024)
https://doi.org/10.1109/ICEEAC61226.2024.10576609
1 (2022)
https://doi.org/10.1109/ICCCIS56430.2022.10037593
97 (2021)
https://doi.org/10.1109/ICESC51422.2021.9532974